Nagoya University

Provided Services (Already available)

Prototype

• Various thin films (refractory metals, oxides, nitrides, magnetic multilayers)
• Plasma etching process development
• Si-based transistor/sensor fabrication
• Power semiconductor fabrication (e.g., GaN etching, gate oxide)
• Spintronics devices (e.g., magnetic multilayers, fine processing)
• 2D & RF semiconductors (e.g., superconductors, microfabrication)
• Photonic-electronic fusion (e.g., waveguides)
• Solar cells (e.g., next-generation materials)

Evaluation

• Electronic state analysis (XPS)
  Evaluation under cryogenic and high magnetic field conditions (PPMS)
• Impurity analysis (XPS, FTIR)
• Magnetic property evaluation (e.g., VSM)
• Unpaired electron analysis under atmospheric pressure plasma irradiation (ESR)
• Crystal structure analysis (XRD)
• Evaluation of surface morphology, composition, mechanical and electromagnetic properties (correlative SEM/AFM in the same field of view)
• Defect (failure) visualization (low-acceleration high-resolution SEM, EBIC, electric field contrast)
• Integration with STEM/TEM/EDS/EELS for atomic structure and electronic state analysis of semiconductors
• Wide-area (3D) analysis of defects using HV-EM and FIB-SEM
• Optical detection and imaging of spin states in quantum sensor materials
• Biocompatibility evaluation of implantable biomedical devices

Provided Services (Provided in future)

Evaluation

• Non-destructive super-resolution high-speed 3D observation of stacking defects and impurity distribution in power semiconductor materials
  (Service launch scheduled around March 2026)
• Super-resolution optical detection and imaging of spin states in quantum sensor materials
  (Service launch scheduled around March 2026)
• Etching of hard-to-process materials such as superconducting and spintronics materials
  (Service launch scheduled around March 2026)