Photonic Integrated Circuits / Photonic-Electronic Fusion Circuits Support for the development of devices and components such as semiconductor lasers and optical waveguides for optical-electrical signal transmission in next-generation semiconductor chips. Includes R&D on optical integrated circuits, epitaxial growth of III-V semiconductors, and heterogeneous material bonding.
III-V Terahertz Devices Support for R&D on processes including T-gate fabrication for high-speed HEMT applications and semiconductor diode elements operating in the 100s of GHz to THz range for 6G and sensor applications.
Micro/Nano Patterning for Semiconductors Provision of microfabrication techniques such as electron beam lithography for next-generation semiconductor device R&D.
Evaluation
Photonic integrated circuits and optoelectronic integrated circuits High-precision measurements such as propagation loss, spectral characteristics, and high-frequency response can be provided through automated probing, from small chips to 300 mm wafers.
Provided Services (Provided in future)
Design
Design support for photonic integrated circuits for optoelectronic integration Support is provided for the design of components used within photonic integrated circuits and for circuit operation. Depending on the circuit, direct transition to fabrication may also be possible. (Service start date: TBD)