National Institute for Materials Science (NIMS)

• NM-233 Inductively Coupled Plasma Optical Emission Spectrometer (Multi Type, Dual View ICP-OES)
• NM-234 Field Emission Electron Probe Micro Analyzer (FE-EPMA)

National Institute of Advanced Industrial Science and Technology (AIST)

• AT-121 Field Emission SEM（JSM7400F）

Kyoto University

• KT-335 Stylus Profilometer

Kagawa University

• GA-017　Forming equimpment for microfabrication