【公開日：2025.06.10】【最終更新日：2025.05.09】

課題データ / Project Data

課題番号 / Project Issue Number

24TU0080

利用課題名 / Title

Thermoelectric generator

利用した実施機関 / Support Institute

東北大学 / Tohoku Univ.

機関外・機関内の利用 / External or Internal Use

内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion

キーワード / Keywords

蒸着・成膜/ Vapor deposition/film formation,CVD,スパッタリング/ Sputtering,成形/ Molding,リソグラフィ/ Lithography,膜加工・エッチング/ Film processing/etching,アクチュエーター/ Actuator,高周波デバイス/ High frequency device,高品質プロセス材料/技術/ High quality process materials/technique,MEMS/NEMSデバイス/ MEMS/NEMS device,セラミックスデバイス/ Ceramic device,センサ/ Sensor,フォトニクスデバイス/ Nanophotonics device,パワーエレクトロニクス/ Power electronics

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

Nguyen Toan

所属名 / Affiliation

東北大学大学院工学研究科

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

利用形態 / Support Type

（主 / Main）機器利用/Equipment Utilization（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

TU-058：マスクレスアライナ
TU-001：エッチングチャンバー
TU-057：レーザ描画装置
TU-060：現像ドラフト

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

This study investigates the incorporation of cellulose nanofibers (CNF) into Bi₂Te₃-based thermoelectric films. CNF, a sustainable and biodegradable material, was hypothesized to improve thermoelectric performance by reducing thermal conductivity through enhanced phonon scattering while maintaining favorable electrical conductivity and Seebeck coefficient.

実験 / Experimental

Cellulose nanofibers (CNFs) with an average length of 1200±960 nm and a width of 12±6.1 nm were utilized which are provided by AIST. The nanocomposite of Bi₂Te₃-CNFs was formed by electrodeposition technology. This CNF composite was patterned with photoresist by photolithography and the CNF was processed.

結果と考察 / Results and Discussion

A cross-sectional SEM photograph of the processed CNF composite is shown in Figure 1. The incorporation of CNF resulted in a remarkable 625% improvement in the ZT value, increasing from 0.124 (pure Bi₂Te₃) to 0.76 at 0.06 wt% CNF. This enhancement was attributed to the unique effects of CNF, such as grain growth suppression, increased phonon scattering, and improved structural integrity. These properties enabled the fabrication of thick, crack-free films (400 µm), overcoming a common limitation of other nanocomposite thermoelectric materials. Compared to findings from other studies, the CNF-Bi₂Te₃ composite films exhibit superior performance, particularly in achieving high thermoelectric efficiency while maintaining structural stability.

図・表・数式 / Figures, Tables and Equations

Figure 1. SEM micrographs of CNF-Bi₂Te₃ composite films (a) Top surface of CNF-Bi₂Te₃ composite films with 0.02 wt% CNF. (b) Cross section of CNF-Bi₂Te₃ composite films with 0.02 wt% CNF. (c) Close-up image of cross section of CNF-Bi₂Te₃ composite films with 0.08 wt% CNF.

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件