利用報告書 / User's Reports

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【公開日:2025.06.10】【最終更新日:2025.05.19】

課題データ / Project Data

課題番号 / Project Issue Number

24JI0040

利用課題名 / Title

遷移金属カルコゲナイド層中の不純物元素の分析

利用した実施機関 / Support Institute

北陸先端科学技術大学院大学 / JAIST

機関外・機関内の利用 / External or Internal Use

外部利用/External Use

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】(主 / Main)物質・材料合成プロセス/Molecule & Material Synthesis(副 / Sub)-

【重要技術領域 / Important Technology Area】(主 / Main)次世代ナノスケールマテリアル/Next-generation nanoscale materials(副 / Sub)-

キーワード / Keywords

STEM, 2-dimensional material,ナノシート/ Nanosheet


利用者と利用形態 / User and Support Type

利用者名(課題申請者)/ User Name (Project Applicant)

Mohmad Abdul Rahman

所属名 / Affiliation

Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

Siti Nur Hidayah Yahya,Yukiko Takamura

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

Yoshifumi Oshima

利用形態 / Support Type

(主 / Main)技術代行/Technology Substitution(副 / Sub)-


利用した主な設備 / Equipment Used in This Project

JI-017:クリーンルーム微細加工装置群


報告書データ / Report

概要(目的・用途・実施内容)/ Abstract (Aim, Use Applications and Contents)

This report details the dry transfer process of doped MoS2 flakes on a glassy carbon substrate onto a Si chip with SiNx window for subsequent STEM imaging. The aim is to verify doping, identify the crystal structure, and determine the phase of doped MoS2. The dry transfer process will be conducted in a cleanroom environment to ensure high-quality transfer without contamination. The obtained STEM images and analysis will confirm the structural properties, doping concentration, and phase the doped MoS2 flakes. This information will facilitate further studies and assessment of the material as a catalyst for hydrogen evolution reaction. 

実験 / Experimental

First, a PDMS/PPC stamp on a glass slide will be prepared. A PDMS film will be attached onto a glass slide, followed by plasma treatment to enhance adhesion. Then, poly-propylene carbonate (PPC) will be drop-casted and spin-coated onto the PDMS. Next, the prepared stamp will be aligned with the MoS2/glassy carbon sample under a microscope. The stamp will be slowly moved towards the sample until they are finally in-contact with each other. The sample will be heated to assist the flakes transfer process. Finally, the stamp with MoS2 flakes will be lifted. The same process will be repeated to transfer the MoS2 flakes onto the TEM chip for STEM imaging.

結果と考察 / Results and Discussion

The successful transfer of the MoS₂ flakes onto the PDMS/PPC stamp and the TEM chip was confirmed using optical microscopy. Subsequent STEM imaging verified the incorporation of dopant atoms into the MoS₂ lattice and revealed details of its crystal structure. Particular attention was paid to the phase of the MoS₂ near the dopant atoms, where local variations in phase were observed.

図・表・数式 / Figures, Tables and Equations
その他・特記事項(参考文献・謝辞等) / Remarks(References and Acknowledgements)


成果発表・成果利用 / Publication and Patents

論文・プロシーディング(DOIのあるもの) / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents

特許出願件数 / Number of Patent Applications:0件
特許登録件数 / Number of Registered Patents:0件

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