【公開日：2025.06.10】【最終更新日：2025.03.17】
課題データ / Project Data
課題番号 / Project Issue Number
24UT0177
利用課題名 / Title
Sub-10 nm Nanopore STEM drilling for ssDNA sequencing
利用した実施機関 / Support Institute
東京大学 / Tokyo Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）計測・分析/Advanced Characterization
【重要技術領域 / Important Technology Area】（主 / Main）次世代ナノスケールマテリアル/Next-generation nanoscale materials（副 / Sub）次世代バイオマテリアル/Next-generation biomaterials
キーワード / Keywords
電子顕微鏡/ Electronic microscope,バイオセンサ/ Biosensor,原子層薄膜/ Atomic layer thin film,膜加工・エッチング/ Film processing/etching
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
Lee Chun-Yen
所属名 / Affiliation
東京大学工学系研究科 機械工学専攻
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
森賀 崇行
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
森田 真理
利用形態 / Support Type
（主 / Main）技術補助/Technical Assistance（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
UT-002：軽元素対応型超高分解能走査透過型電子顕微鏡（Cs-STEM）
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Solid-state nanopores offer a promising platform for next-generation biomolecular sensing and sequencing. However, achieving precise control over nanopore size and shape remains a significant challenge. Here, we demonstrate the fabrication of sub-10 nm nanopores in monolayer MoS2 using an electron beam in a scanning transmission electron microscope (STEM). These nanopores are specifically tailored for ssDNA sequencing applications, providing a pathway toward improved control and performance in nanopore-based sensing technologies.
実験 / Experimental
We have conducted nanopore drilling by utilizing 200kV acceleration voltage STEM (JEM-ARM200F ColdFE). Below are the procedures:1. Irradiate the single-layer MoS2 membrane with a beam in Ronchigram mode to sputter atoms and open a nanopore. 2. Observe the resulting nanopore shape in low-magnification scan mode.
結果と考察 / Results and Discussion
We have successfully fabricated nanopores on a MoS2 membrane, measuring approximately 6 nm in diameter (Fig. 1(a)) and 4 nm in diameter (Fig. 1(b)). In particular, the 6 nm nanopore exhibited a highly circular shape. Thanks to their small geometry, these nanopores are expected to effectively capture DNA signals in sequencing or sensing experiments.
図・表・数式 / Figures, Tables and Equations
Fig. 1 Nanopore images under STEM (a) nanopore with 6nm in diamater (b) nanopore with 4nm in diameter
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件