【公開日：2025.06.10】【最終更新日：2025.05.13】
課題データ / Project Data
課題番号 / Project Issue Number
24UT0142
利用課題名 / Title
セラミック材料のレーザ加工効果の評価観察
利用した実施機関 / Support Institute
東京大学 / Tokyo Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）計測・分析/Advanced Characterization（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed（副 / Sub）マテリアルの高度循環のための技術/Advanced materials recycling technologies
キーワード / Keywords
セラミックスデバイス/ Ceramic device,光デバイス/ Optical Device,電子顕微鏡/ Electronic microscope,高品質プロセス材料/技術/ High quality process materials/technique
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
WEI CHAORAN
所属名 / Affiliation
東京大学大学院工学系研究科機械工学専攻
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ZHANG YANMING
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）,技術補助/Technical Assistance
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
Zirconia ceramic (ZrO2) exhibits excellent mechanical and stable chemical properties, which is widely used in aeroengine structural parts, intelligent terminal precision components, bone repair, and other advanced manufacturing fields. To evaluate the processing surface integrity, including surface morphology and elements contents, as well as explore the parameter dependence in ultrashort pulse laser processing, we used a high-resolution SEM capable of EDX analysis for investigation.
実験 / Experimental
The morphological characterizations of the laser processed ceramic and glass materials were performed using a scanning electron microscopy (SEM) of JSM-6510LA. The comparison between femtosecond laser and TSL processing was performed. The chemical compositions were measured using an energy dispersive X-ray spectroscopy microprobe attached to the SEM at 15000× magnification, and the composition and content of the surface compounds were analyzed by a X ray diffractometer (XRD). The experimental results support us to analyze the material vaporization and removal processes that occur within the microsecond scale as well as the intense element migration.
結果と考察 / Results and Discussion
Compared to the femtosecond laser processing of ZrO2, TSL processing can lead to a smoother surface morphology and fewer residues. This can be attributed to the ultrahigh TSL processing efficiency and sufficient material vaporization and removal processes that occur within the microsecond scale by absorbing the CW laser energy, leading to faster and more intense element migration.Additionally, morphological changes after TSL processing with different sample positions. Specifically, rougher surface morphology was generated with high sample position of 110 μm. More intensive material removal occurred with proper sample position (110 μm), and this, in turn, resulted in the increase of the morphological structure size. Some debris are also observed, which may be attributed to the rapid melting and solidification of the material in the TSL.XRD was used to examine the phase composition of the machined surface; the characteristic diffraction peak of ZrO2. Without TSL processing, monoclinic phase with high peak of ZrO2 material can be observed, and some cubic (with diffraction peaks located at 2θ=30.12°, 34.92°, 50.21°and 59.67°) and tetragonal phase (with diffraction peaks located at 2θ = 59.63°) were also found. After the TSL processing with tp = 24 μs, a significant decrease of the monoclinic phase as well as significant increase of cubic phase can be observed, indicating that the monoclinic phase was converted to a cubic phase. A higher peak of the tetragonal phase was also observed, indicating no undesirable phase change from tetragonal to monoclinic. Moreover, the amount of cubic and tetragonal phases further increased with tp = 84 μs, indicating that phase change occurred under longer processing time. Thus, a larger amount of the stable cubic phase was produced during TSL processing, which indicates better material characteristics and surface integrity.
図・表・数式 / Figures, Tables and Equations
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
Zhang, Y., Wei, C., Fukui, T., Sugita, N., & Ito, Y. (2024). Ultrafast processing of zirconia ceramics by transient and selective laser absorption. Ceramics International, 50(14), 25273-25281.Wei, C., Zhang, Y., Sugita, N., & Ito, Y. (2024). Generation mechanism and temporal–spatial evolution of electron excitation induced by an ultrashort pulse laser in zirconia ceramic. Applied Physics A, 130(2), 105.
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
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Chaoran Wei, Generation mechanism and temporal–spatial evolution of electron excitation induced by an ultrashort pulse laser in zirconia ceramic, Applied Physics A, 130, (2024).
DOI: https://doi.org/10.1007/s00339-023-07223-7
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Yanming Zhang, Ultrafast processing of zirconia ceramics by transient and selective laser absorption, Ceramics International, 50, 25273-25281(2024).
DOI: https://doi.org/10.1016/j.ceramint.2024.04.257
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件