【公開日：2025.06.10】【最終更新日：2025.03.13】
課題データ / Project Data
課題番号 / Project Issue Number
24KT2103
利用課題名 / Title
Quartz結晶基板の切断
利用した実施機関 / Support Institute
京都大学 / Kyoto Univ.
機関外・機関内の利用 / External or Internal Use
内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）量子・電子制御により革新的な機能を発現するマテリアル/Materials using quantum and electronic control to perform innovative functions（副 / Sub）-
キーワード / Keywords
ダイシング/ Dicing,超伝導/ Superconductivity
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
前野 悦輝
所属名 / Affiliation
京都大学 高等研究院 豊田理研-京大連携拠点 (TRiKUC)
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ジョルダノ・マットニ (Giordano MATTONI)
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
赤松孝義
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）,技術相談/Technical Consultation
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
In our low-temperature experiments, we are using uniaxial pressure as a powerful tool to modify the properties of materials. For the unconventional superconductor Sr2RuO4, uniaxial pressure can be used to enhance the superconducting transition temperature from 1.5 to about 3.5K. Due to the brittle nature of oxide materials, it is desirable to glue the sample crystal on a substrate material to be used as mechanical support. We are developing a technique that involves using single-crystal quartz as substrate material, over which our sample Sr2RuO4 crystals are glued. To achieve homogeneous transfer of strain to the Sr2RuO4, it is necessary to slice single-crystal quartz with high precision in the desired size. For this specific session, we cut larger pieces of quartz after performing a blade dressing to maintain clean cut quality.
実験 / Experimental
For our experiments, it is desirable to obtain quartz bars in the shape of 5mm x 0.3mm x 0.16mm, but also wider dimensions of 1, 1.5, and 2mm were produced in this session. We previously diced single-crystal quartz wafers (13.95mm diameter, 0.16mm thickness) by using B1A and ZP07 blades at the NanoHub (KT-219). As instructed by Akamatsu-san, we performed blade dressing of the blade B1A862-SD1200L with the board GC2000NB50. The blade height was consumed from 1.702mm to 1.621mm after the dressing. The diced quartz pieces had optimal edges.
結果と考察 / Results and Discussion
For our experiment, it is highly important
to obtain quartz pieces with straight edges. Due to the high width-to-length
ratio of the desired quartz slices, the material is prone to fracture upon
dicing. We used a dicing blade B1A 1200, which has a finer grain than
the B1A 400 that was used in the previous cutting rounds. We performed the
following cuts:
-
5x at 0.55mm spacing
-
3x at 1.2mm spacing
-
2x at 1.7mm spacing
-
2x at 2.2mm spacing
All the cuts were rather clean and sharp,
achieving the desired result (Fig. 1). We were satisfied with the
results of this fabrication which yield quartz bars ideal for our strain
experiments.
図・表・数式 / Figures, Tables and Equations
Fig.1: Diced single-crystal quartz wafer.
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
[References] G. Mattoni, S. Matsubara, M. Waqee-ur-Rehman, S. Yonezawa, Y. Maeno,"Tunable Uniaxial Strain to Investigate Sr2RuO4 Unconventional Superconductivity"
1. 29th International Workshop on Oxide Electronics (iWOE-29) and
2. Workshop on Strongly Correlated Systems 2023(Busan, Korea, 2023/Oct/15-20)
Poster presentations
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件