【公開日：2025.06.10】【最終更新日：2025.04.22】

課題データ / Project Data

課題番号 / Project Issue Number

24UT1091

利用課題名 / Title

ナノカーボンエネルギーデバイスの創成

利用した実施機関 / Support Institute

東京大学 / Tokyo Univ.

機関外・機関内の利用 / External or Internal Use

内部利用（ARIM事業参画者以外）/Internal Use (by non ARIM members)

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）革新的なエネルギー変換を可能とするマテリアル/Materials enabling innovative energy conversion（副 / Sub）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed

キーワード / Keywords

Nanowires and nanotubes, Carbon related materials, CNT,センサ/ Sensor,電極材料/ Electrode material,エレクトロデバイス/ Electronic device,光リソグラフィ/ Photolithgraphy,膜加工・エッチング/ Film processing/etching

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

千足 昇平

所属名 / Affiliation

東京大学工学部機械工学科

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

Weijie Jia,緒方　慶一郎,榊原　海大,金井　優輝,藤原　陸

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

利用形態 / Support Type

（主 / Main）機器利用/Equipment Utilization（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

UT-505：レーザー直接描画装置 DWL66+2018
UT-600：汎用ICPエッチング装置
UT-502：光リソグラフィ装置PEM800

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

Aim:This research aims to elucidate the interaction mechanisms between carbon nanotubes (CNTs) and water molecules by leveraging CNTs' quasi-one-dimensional structure. By investigating how water molecules move within CNTs and interact with electrons and holes, the study seeks to understand the fundamental mechanisms that govern this interaction. The findings are expected to provide valuable insights for optimizing CNT-based devices and sensor technologies.Applications:The outcomes of this study have significant potential for advancing nanotechnology applications. These include the development of high-efficiency water-quality sensors, energy conversion devices, and next-generation nano-electronic devices. Understanding the interaction between water and CNTs could also lead to breakthroughs in designing nanoscale systems for molecular transport and environmental monitoring. Contents:The study involves fabricating a specialized CNT-based device to explore the movement of water molecules and their interactions with carriers under different conditions. Experimental methods include electrical measurements, photoluminescence (PL), Raman spectroscopy, and Rayleigh scattering to analyze CNTs' optical and electrical properties. 

実験 / Experimental

Substrate Preparation: A silicon substrate with an oxide layer is used to form trenches via lithography and etching. CNT Integration: Individual CNTs are synthesized by CVD and transferred to Si substrate.Electrode Placement: Electrodes are positioned to apply voltages across the CNT and enable control of the water molecule transport within. A back-gate electrode setup is included for additional electrical manipulation. Electrical Measurements:Apply voltage across the CNT to induce water molecule movement and analyze the resultant changes in electrical conductivity and carrier behavior. Optical Characterization:Use photoluminescence (PL), Raman spectroscopy, and Rayleigh scattering to examine CNTs' optical responses during water molecule confinement and interaction. Voltage Modulation:Alter the back-gate voltage to study how electron-water and hole-water interactions vary under different electrical conditions.

結果と考察 / Results and Discussion

The suspended CNT with electrode is successfully fabricated as figure 1. And FET’s ON/OFF property is confirmed. However, during transferring, CNTs are bundled which is a bad news for further optical measurement. CNT with electrode on SiO₂ substrate is also successfully fabricated as figure 2, and measured under water vapor environment. But the signal seems coming from the absorption of outer wall of CNT not the flow in CNT. We decide to heat substrate for further measurement.

図・表・数式 / Figures, Tables and Equations

Fig. 1 suspended CNT with electrode but bundled

Fig. 2 single CNT with electrodes

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

1. 榊原　海大，金田　遼太郎，金井 優輝，藤原　陸，西村　帆貴，宮田　和香，大塚　慶吾，丸山　茂夫，千足　昇平，「清浄な転写法による長尺架橋 SWCNT の作製と光学測定」，熱工学コンファレンス2024（山口），2024年10月6日

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件