【公開日：2025.06.10】【最終更新日：2025.05.21】

課題データ / Project Data

課題番号 / Project Issue Number

24UT1073

利用課題名 / Title

Integration of single-defect carbon nanotubes photon sources into waveguide circuits for quantum applications

利用した実施機関 / Support Institute

東京大学 / Tokyo Univ.

機関外・機関内の利用 / External or Internal Use

外部利用/External Use

技術領域 / Technology Area

【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-

【重要技術領域 / Important Technology Area】（主 / Main）次世代ナノスケールマテリアル/Next-generation nanoscale materials（副 / Sub）高度なデバイス機能の発現を可能とするマテリアル/Materials allowing high-level device functions to be performed

キーワード / Keywords

Integrated Quantum Photonics Circuits, Carbon nanotubes, CNT,スパッタリング/ Sputtering,電子線リソグラフィ/ EB lithography,膜加工・エッチング/ Film processing/etching,ナノチューブ/ Nanotube,光導波路/ Optical waveguide,エレクトロデバイス/ Electronic device,光デバイス/ Optical Device,量子効果デバイス/ Quantum effect device

利用者と利用形態 / User and Support Type

利用者名（課題申請者）/ User Name (Project Applicant)

加藤 雄一郎

所属名 / Affiliation

理化学研究所加藤ナノ量子フォトニクス研究室

共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes

ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes

利用形態 / Support Type

（主 / Main）機器利用/Equipment Utilization（副 / Sub）-

利用した主な設備 / Equipment Used in This Project

UT-503：超高速大面積電子線描画装置
UT-604：高速シリコン深掘りエッチング装置
UT-605：塩素系ICPエッチング装置
UT-702：川崎ブランチECRスパッタリング装置

報告書データ / Report

概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)

The objective of this research is to realize room-temperature integrated quantum photonics circuits by implementing functionalized single-photon emitting carbon nanotubes on chip.  This research involves the realization of coupling nano-devices for quantum photonic coupling enhancement and spectral tailoring, but also the implementation of optical circuit structures to demonstrate various system applications.

実験 / Experimental

In the cleanroom, typical integrated photonics circuit fabrication processes are developed, using SOI, SiN or LN (Lithium niobate) based substrates as shown in Fig.1. This mainly involves the regular use of advanced electron-beam lithography, material deposition by the sputter apparatus and dry/wet etching technologies by using  the etching apparatus, using both optical characterization and circuit testing as a feedback to improve processes. 

結果と考察 / Results and Discussion

For the past year, a large variety of photonic nano-structures such as waveguides, couplers, ring resonators or cavities have been successfully fabricated and tested with custom processes developed from scratch. Single carbon-nanotubes have been coupled to these circuits and recently demonstrated planar waveguide photon propagation, a critical step achievement for this research.

図・表・数式 / Figures, Tables and Equations

Fig.1 Lithium niobate photonic waveguide cavity with couplers for carbon nanotube circuit integration.

その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)

We acknowledge the Japanese Society for the Promotion of Science for funding this research, Riken nanoscale quantum photonics laboratory members for sharing cleanroom recipes and Takeda CR staff members such as Fujiwara-san and Mizushima-san for their technical help.

成果発表・成果利用 / Publication and Patents

論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)

口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.

特許 / Patents

特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件