【公開日：2025.06.10】【最終更新日：2025.04.30】
課題データ / Project Data
課題番号 / Project Issue Number
24UT1071
利用課題名 / Title
In-situ monitor of single molecule functionalization behavior for electrically driven single photon emitters
利用した実施機関 / Support Institute
東京大学 / Tokyo Univ.
機関外・機関内の利用 / External or Internal Use
外部利用/External Use
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）次世代ナノスケールマテリアル/Next-generation nanoscale materials（副 / Sub）-
キーワード / Keywords
SWCNT, chiralities, quantum light sources,電子線リソグラフィ/ EB lithography,ダイシング/ Dicing,ナノチューブ/ Nanotube,膜加工・エッチング/ Film processing/etching
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
加藤 雄一郎
所属名 / Affiliation
理化学研究所加藤ナノ量子フォトニクス研究室
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
Mengyue Wang
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）-
利用した主な設備 / Equipment Used in This Project
UT-503：超高速大面積電子線描画装置
UT-604：高速シリコン深掘りエッチング装置
UT-900：ステルスダイサー
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
We utilized the Takeda cleanroom facilities to fabricate trenches on silica substrates. Through metal catalyst deposition and chemical vapor deposition techniques, we successfully synthesized air-suspended carbon nanotubes (CNTs) with diverse chiralities. Furthermore, we built a controllable functionalization procedure to introduce quantum defects into the nanotubes and examined their photoluminescence properties.
実験 / Experimental
We employed an electron beam lithography system and a silicon deep etching system to fabricate trenches of varying widths on silicon substrates. Subsequently, carbon nanotubes were synthesized within the trenches using a chemical vapor deposition process. These nanotubes were then functionalized with aryl groups, and their photoluminescence properties were analyzed through microspectroscopy measurements.
結果と考察 / Results and Discussion
This study investigates the reaction behavior of reactants on SWCNTs, as revealed by the appearance of defect emission peaks in time-resolved photoluminescence signals as shown in Fig.1. Additionally, the time-dependent evolution of the functionalization process is explored to gain deeper insights into its dynamics. By understanding the vapor-phase functionalization mechanism, molecules can be reliably doped into air-suspended SWCNTs (Single Walled CNTs), enabling stable single-photon emission. This precise control over molecular doping is crucial for developing quantum light sources. Furthermore, well-characterized single-molecule functionalization on SWCNTs offers exciting opportunities for molecular-scale electronics, where individual functionalized nanotubes can serve as building blocks for nanoscale devices. These advancements have the potential to drive breakthroughs in nanofabrication technologies, paving the way for next-generation optoelectronic applications.
図・表・数式 / Figures, Tables and Equations
Fig. 1 (a) 2D Photoluminescence map, (b) Emission spectra before and after functionalize with aryl group treatment, (c) Optical microscopy image.
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
- M. Wang, D. Kozawa, Y. K. Kato, “In-situ monitoring of vapor-phase functionalization of air-suspended carbon nanotubes”, 9th Workshop on Nanotube Optics and Nanospectroscopy (WONTON), Heidelberg, Germany (September 16, 2024).
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件