【公開日：2025.06.10】【最終更新日：2025.05.13】
課題データ / Project Data
課題番号 / Project Issue Number
24IT0031
利用課題名 / Title
Fabrication of Micro-patterns
利用した実施機関 / Support Institute
東京科学大学 / Science Tokyo
機関外・機関内の利用 / External or Internal Use
外部利用/External Use
技術領域 / Technology Area
【横断技術領域 / Cross-Technology Area】（主 / Main）加工・デバイスプロセス/Nanofabrication（副 / Sub）-
【重要技術領域 / Important Technology Area】（主 / Main）次世代ナノスケールマテリアル/Next-generation nanoscale materials（副 / Sub）-
キーワード / Keywords
リソグラフィ/ Lithography,光リソグラフィ/ Photolithgraphy
利用者と利用形態 / User and Support Type
利用者名（課題申請者）/ User Name (Project Applicant)
崔 埈豪
所属名 / Affiliation
東京都市大学理工学部 機械工学科
共同利用者氏名 / Names of Collaborators in Other Institutes Than Hub and Spoke Institutes
ARIM実施機関支援担当者 / Names of Collaborators in The Hub and Spoke Institutes
利用形態 / Support Type
（主 / Main）機器利用/Equipment Utilization（副 / Sub）,機器利用/Equipment Utilization
利用した主な設備 / Equipment Used in This Project
報告書データ / Report
概要（目的・用途・実施内容）/ Abstract (Aim, Use Applications and Contents)
The creation of micro-patterns on Diamond-Like Carbon (DLC) films holds significant industrial potential, with many applications still unexplored. This study aims to assess the feasibility of using photolithographic technology for generating diverse patterns.
実験 / Experimental
The fabrication of micro-patterns on the DLC top surface substrate involves several experimental steps: Applying HMDS and S1818 photoresist using a spin coating machine. Heating the substrate to 110-125°C after each coating with a heater. Employing the Maskless exposure system (Dainihon Kaken MX-1205) to create the desired patterns. Removing unpatterned areas with the AZ300MIF development solution. Verifying the patterns using a microscope.
結果と考察 / Results and Discussion
Following the fabrication of various pattern sizes ranging from 3×3 to 10×10 microns, it was observed that the 3×3, 4×4, and 5×5 patterns exhibited distortion compared to the larger sizes by using laser microscope owned by ourselves. We believe that the surface roughness of the DLC top layer significantly impacts pattern resolution. To address this issue, we are considering depositing a thin metallic layer on the DLC film.
図・表・数式 / Figures, Tables and Equations
Figure Depth profile of the DLC punch array after Al etching (a) 2D top view of the microchannels, (b) Laser microscopy measurement of the microchannels, (c) Schematic illustration of the depth profile after Al etching Step
その他・特記事項（参考文献・謝辞等） / Remarks(References and Acknowledgements)
成果発表・成果利用 / Publication and Patents
論文・プロシーディング（DOIのあるもの） / DOI (Publication and Proceedings)
口頭発表、ポスター発表および、その他の論文 / Oral Presentations etc.
特許 / Patents
特許出願件数 / Number of Patent Applications：0件
特許登録件数 / Number of Registered Patents：0件