Institute of Science Tokyo (Former Tokyo Institute of Technology)

• IT-040 Surface-activated Room-temperature Bonding
• IT-041 Ion-beam milling system
• IT-042 Electron Beam Lithograpy
• IT-043 Electron Beam Evaporator
• IT-044 Laser lithography

The University of Osaka

• OS-130 Full automatic electron beam evaporation - Scannning Electron Microscope

Hiroshima University

• RO-419 Reactive ion etching system for SiO2
• RO-420 ICP etching system for Si
• RO-325 6-target Sputtering system
• RO-332 Atomic Layer Deposition
• RO-516 Semiconductor Parameter Analyzer
• RO-517 Mixed Signal Oscillosope