Toyohashi University of Technology (To Be Made Available Upon Completion of Operational Setup)

• TH-101 Wet bench
• TH-201 Metal Deposition System
• TH-202 Dielectric Deposition System
• TH-221 LPCVD system
• TH-222 Plasma Enhanced CVD system
• TH-301 Dry etching system
• TH-401 Oxidation/Thermal Processing System
• TH-411 Doping system
• TH-501 i-line lithography system
• TH-502 Contact lithography system
• TH-503 Maskless lithography system
• TH-521 Coater and Developer system
• TH-601 Wafer dicing system
• TH-611 Bondimg system
• TH-701 Electron Microscopy System
• TH-721 Optical Inspection System
• TH-801 Thin Film Measurement System
• TH-821 Semiconductor Electrical Characterization System