Toyohashi University of Technology (To Be Made Available Upon Completion of Operational Setup)
- TH-101 Wet bench
- TH-201 Metal Deposition System
- TH-202 Dielectric Deposition System
- TH-221 LPCVD system
- TH-222 Plasma Enhanced CVD system
- TH-301 Dry etching system
- TH-401 Oxidation/Thermal Processing System
- TH-411 Doping system
- TH-501 i-line lithography system
- TH-502 Contact lithography system
- TH-503 Maskless lithography system
- TH-521 Coater and Developer system
- TH-601 Wafer dicing system
- TH-611 Bondimg system
- TH-701 Electron Microscopy System
- TH-721 Optical Inspection System
- TH-801 Thin Film Measurement System
- TH-821 Semiconductor Electrical Characterization System